Noncontact Sheet Resistance Instrumentation

S3 Sheet Resistance Meter

single sided eddy current sensor measuring silicon wafer single sided sheet resitance meter one sided conductane meter mounted in stage stage for single sided eddy current precision measurement single sided eddy current precision measurement inline eddy current meter

Noncontact Eddy Current Sheet Resistance Meter for Thick and Curved Materials

  • The smallest, simplest, and most affordable high-precision noncontact sheet resistance sensor available
  • Reads any conductive coating—on even the thickest nonconductive substrates
  • Performance limited by "lift off" phenomenon—elevation of sensor above conductive layer must be carefully controlled
  • Noncontact measurement of ohms/square, ohms-cm, resistivity, thickness, and more
  • Choose a sensor in one of four ranges, from .005 ohms/square to 100,000 ohms/square
  • Add additional sensors later to measure additional points or to widen the range
  • Simple one-button operation
  • Options include PC-based productivity software, stage, and more

Four Ranges to Choose From

Up to five significant digits available, depending on instrument range.

Instrument Range Dynamic Range in Ohms/square Significant Digits Available at Each Order of Magnitude
Low End High End 10k 1k 100 10 1 .1 .01 .001
×10 5 100,000 1 2 3 4 5
×1 .5 10,000 1 2 3 4 5
÷10 .05 1,000 1 2 3 4 5
÷100 .005 100 1 2 3 4 5
Reading rate: 30 ms
Reading display rate: 240 ms (instrument displays the average of eight readings)
Reading drift with temperature: No more than .125% of total resolution per degree Celsius per hour
Gap size: Gap between sensor and material can vary, but it must be carefully controlled
Minimum sample size: 3 cm diameter circle
Spatial resolution: 3 cm diameter circle
Maximum sample thickness: Accommodates infinite nonconductive substrates
Reach in web: Not applicable
  • Touch screens, flat screens, ITO, TCOs, etc.
  • Advanced materials (carbon nanotube, graphene, silver nanowire, etc.)
  • Semiconductor materials
  • Photovoltaic materials
  • Architectural glass (Low-E), smart glass
  • OLED and LED applications
  • Packaging, decorative films/paper, metalized labels, microwave susceptors, reflective materials
  • Flex circuitry and flexible circuit boards
  • Metalized capacitor foil
  • Low observables
  • Batteries and fuel cells
  • De-icing and heating products
  • Antennas
  • Anti-static films

Options and upgrades

All options and upgrades are available for purchase with the original unit and for at least one year after purchase.

  • PC-based software upgrade:

    This configuration does not require software for operation; however, Delcom’s productivity software is a very valuable tool. Delcom's powerful software has many useful features, allowing users to set pass/fail thresholds, monitor multiple sensors at once, save data for further analysis, and more. It is designed to make common tasks as fluid, intuitive, and easy as possible. The software requires a PC running Windows XP or newer OS.

  • Additional sensors:

    The 873 Interface Module can accommodate up to 12 sensors. A user may want to purchase additional sensors in order to increase the range of the entire system or to take measurements at two or more physical locations.

  • S3 stage:

    The sensor is designed to be used without a stage. However, a stage is recommended for applications requiring a high level of precision. The stage will hold the elevation of the conductive layer flush with the sensor and allow for better xy positioning of the material above the sensor.

  • Optional computer:

    Delcom can source a laptop, desktop, tablet, or industrial touchpanel PC for customers, if needed.