Noncontact Sheet Resistance Instrumentation

20J3 Sheet resistance meter

eddy current sensor measuring silicon wafer eddy current sensor with sensor probe eddy current precision measurement with stage to control sample placement caliper style eddy current meter quickly characterize sheet resistance witout contact measure samples smaller than the sensor probe user customizable grid overlays

Noncontact Eddy Current Sheet Resistance Meter for Thin Materials

  • Delcom's bestselling instrument
  • Measures nearly all thin conductive materials or coatings
  • Noncontact measurement of ohms/square, ohms-cm, resistivity, thickness, and more
  • Choose a sensor in one of four ranges, from .005 ohms/square to 100,000 ohms/square
  • Add additional sensors later to measure additional points or to widen the range
  • For benchtop or inline applications
  • Simple one-button operation
  • Small footprint with detached sensor probe
  • Options include vacuum-ready probe, PC-based productivity software, Ethernet connectivity, stage, and more

Four Ranges to Choose From

Up to five significant digits available, depending on instrument range.

Instrument Range Dynamic Range in ohms/square Significant Digits Available at Each Order of Magnitude
Low End High End 10k 1k 100 10 1 .1 .01 .001
×10 5 100,000 1 2 3 4 5
×1 .5 10,000 1 2 3 4 5
÷10 .05 1,000 1 2 3 4 5
÷100 .005 100 1 2 3 4 5
Reading rate: 30 ms
Reading display rate: 240 ms (instrument displays the average of eight readings)
Reading drift with temperature: No more than .04% of total resolution per degree Celsius per hour
Sensor gap: 3 mm
Minimum sample size: 3 cm diameter circle
Spatial resolution: 3 cm diameter circle
Maximum sample thickness: 1.5 mm
Reach into material: 20 cm
  • Touch screens, flat screens, ITO, TCOs, etc.
  • Carbon nanotube, graphene, silver nanowire, etc.
  • Semiconductor materials
  • Photovoltaic materials
  • Architectural glass (Low-E), smart glass
  • OLED and LED applications
  • Packaging, decorative films/paper, metalized labels, microwave susceptors, reflective materials
  • Flex circuitry and flexible circuit boards
  • Metalized capacitor foil
  • Low observables
  • Batteries and fuel cells
  • De-icing and heating products
  • Antennas
  • Anti-static films

Options and upgrades

All options and upgrades are available for purchase with the original unit and for at least one year after purchase.

  • PC-based software upgrade:

    This configuration does not require software for operation; however, Delcom’s productivity software is a very valuable tool. Delcom's powerful software has many useful features, allowing users to set pass/fail thresholds, monitor multiple sensors at once, save data for further analysis, and more. It is designed to make common tasks as fluid, intuitive, and easy as possible. The software requires a PC running Windows XP or newer OS.

  • Ethernet connectivity upgrade:

    This option is for integration with a PLC or other process control systems. It enables full remote read and control of up to six sensors via Ethernet. It also includes a fully functional website for diagnostics and setup.

  • Additional sensors:

    The 873 Interface Module can accommodate up to 12 sensors. A user may want to purchase additional sensors in order to increase the range of the entire system or to take measurements at two or more physical locations.

  • 20J3 stage:

    The sensor is designed to be used without a stage. However, a stage is recommended for applications requiring a high level of precision. The stage will keep the elevation of the conductive layer consistent in the sensor gap and allow for better xy positioning of the material within the sensor.

  • Vacuum-ready package:

    The sensor is vacuum ready; however, optional vacuum-ready cabling, brackets, and feedthrough(s) will be required for vacuum applications.

  • Optional computer:

    Delcom can source a laptop, desktop, tablet, or industrial touchpanel PC for customers, if needed.